Mosfet device with undulating channel

ABSTRACT

A SiC MOSFET device with alternating p-well widths, including an undulating channel, is described. The undulating channel provides current paths of multiple widths, which enables optimization of on-resistance, transconductance, threshold voltage, and channel length. The multi-width p-well region further defines corresponding multi-width Junction FETs (JFETs). The multi-width JFETs enable improved response to a short-circuit event. A high breakdown voltage is obtained by distributing a high electric field in a JFET of a first width into a JFET of a second width.

RELATED APPLICATIONS

This application is a divisional application of U.S. patent application Ser. No. 17/248,160, filed Jan. 12, 2021, which is incorporated by reference herein in its entirety.

TECHNICAL FIELD

This description relates to vertical metal oxide semiconductor field effect transistors (MOSFETs), including Silicon Carbide (SiC) MOSFETs.

BACKGROUND

Silicon carbide (SiC) metal-oxide-semiconductor field effect transistors (MOSFETs) may be characterized with respect to a safe operating area (SOA), which refers to voltage and/or current ranges over which such SiC MOSFETs are expected to operate without damage. It is possible to make SiC MOSFETs having advantageous features, such as a smaller size, lower power losses, and faster switching speeds, as compared to, e.g., silicon power devices of similar voltage rating.

However, it may be difficult to take full advantage of such features. For example, SiC MOSFETs used for switching applications may benefit from low on-resistance and high transconductance, but optimizing a SiC MOSFET for these parameters may reduce a corresponding SOA of the SiC MOSFET. In other examples, small sizes of SiC MOSFETs may also decrease ruggedness in response to short-circuit events.

SUMMARY

According to one general aspect, a Silicon Carbide (SiC) semiconductor device includes a substrate of a first conductivity type, a drift region of the first conductivity type disposed on the substrate, a channel region of a second conductivity type within the drift region and disposed along a longitudinal axis, and a source region of the first conductivity type disposed within the channel region. The SiC semiconductor device further includes a plurality of junction field effect transistor (JFET) regions between the channel region and the drift region, and gates disposed along the longitudinal axis and on at least a portion of the source region, the channel region, and the plurality of JFET regions. The SiC semiconductor device includes a first cross-sectional area orthogonal to the longitudinal axis, in which the channel region has a first width, and a second cross-sectional area orthogonal to the longitudinal axis, in which the channel region has a second width that is smaller than the first width.

According to another general aspect, a Silicon Carbide (SiC) semiconductor device includes a substrate of a first conductivity type, a drift region of the first conductivity type disposed on the substrate, and a channel region of a second conductivity type within the drift region, the channel region having an undulating channel edge. The SiC semiconductor device includes a source region disposed in the channel region, a plurality of junction field effect transistor (JFET) regions disposed between the channel region and the drift region, the plurality of JFET regions having widths that alternate in correspondence with undulations of the undulating channel edge, and at least one gate disposed on at least a portion of the source region, the channel region, and the plurality of JFET regions.

According to another general aspect, a method of making a SiC semiconductor device includes providing a drift region on a substrate, and implanting a channel region in the drift region and along a longitudinal axis, the channel region having alternating well (e.g., p-well) widths with respect to the longitudinal axis. The method further includes implanting a source region in the channel region, and providing at least one gate on at least a portion of the source region, at least a portion of the channel region, and on a plurality of junction field effect transistor (JFET) regions disposed between the channel region and the drift region, the plurality of JFET regions having alternating JFET widths that alternate in correspondence with the alternating well (e.g., p-well) widths.

The details of one or more implementations are set forth in the accompanying drawings and the description below. Other features will be apparent from the description and drawings, and from the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an isometric side view of a MOSFET device with an undulating channel edge.

FIG. 2 is a top view of an implementation of the MOSFET device of FIG. 1 .

FIG. 3 illustrates two simplified cross-sectional views of the MOSFET device of FIG. 1 .

FIG. 4 is a more detailed cross-sectional view of the MOSFET device of FIG. 1 .

FIG. 5 is a top view of a more detailed example implementation of the MOSFET device of FIG. 1 .

FIGS. 6A-6D illustrate an example process flow for making the MOSFET device of FIG. 1 .

FIG. 7 illustrates an isometric view of an implementation of the MOSFET device of FIG. 1 , including a first current density distribution.

FIG. 8 illustrates an isometric view of the implementation of the MOSFET device of FIG. 17 , including a second current density distribution.

FIG. 9 is a graph illustrating a current-voltage characteristic of the example of FIG. 7 .

FIG. 10 is a graph illustrating a current-voltage characteristic of the example of FIG. 8 .

FIG. 11 is a graph illustrating example changes in threshold voltage with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 .

FIG. 12 is a graph illustrating example changes in specific on-resistance with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 .

FIG. 13 is a graph illustrating example changes in short circuit current I_(sc) with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 .

FIG. 14 is a graph illustrating example changes in breakdown voltage (BV) with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 .

FIG. 15 illustrates example doping profiles at multiple processing stages and variations thereof with respect to extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 .

FIG. 16 is a graph illustrating resulting doping concentrations in example implementations of the structure of FIG. 1 , using the example values from FIG. 15 for delta L_(pull-back) in the undulating channel.

FIG. 17 is a graph illustrating specific on-resistance as a function of threshold voltage for an example implementation of FIG. 1 .

FIG. 18 is a graph illustrating threshold voltage as a function of temperature for an example implementation of FIG. 1 .

DETAILED DESCRIPTION

The present disclosure describes a SiC MOSFET device having desired on-resistance and transconductance values, without requiring (or with minimizing of) a corresponding trade-off in either threshold voltage V_(TH) or channel length of the SiC MOSFET device. As referenced above, low on-resistance and high transconductance may be desirable characteristics for a SiC MOSFET, but, in conventional devices, are associated with SOA reductions. It is possible to increase V_(TH) and/or increase a channel length of a SiC MOSFET to maintain a desired SOA, but doing so typically offsets the desired on-resistance and transconductance values.

The present disclosure, in contrast, describes a SiC MOSFET device with multiple, e.g., alternating, p-well widths, including a SiC MOSFET device with an undulating or oscillating channel. The resulting channel provides current paths of multiple widths, which together circumvent the previously-required trade-offs between on-resistance and transconductance on one hand, and V_(TH) and channel length on the other hand. As a result, for example, a SOA of the SiC MOSFET device may be maintained or improved, while providing low on-resistance and high transconductance, as well as small size and high switching speeds.

The multi-width p-well region further defines corresponding multi-width, e.g., alternating, Junction FETs (JFETs). The multi-width JFETs enable improved response to a short-circuit event, e.g., controlling a short circuit current. A high breakdown voltage is obtained by distributing a high electric field in a JFET of a first width into a JFET of a second width.

Described SiC MOSFET devices may be made using inexpensive, high-throughput techniques. Such techniques may be fine-tuned or otherwise optimized to enable obtaining of desired characteristics. In particular, a delta between a first p-well width and a second p-well width may be adjusted to obtain desired characteristics. For example, this delta may be directly proportional to V_(TH), on-resistance, and breakdown voltage, while being inversely proportional to short-circuit current.

Thus, the described SiC MOSFET device provides ruggedness and reliability, while also providing superior performance characteristics during power switching, with a small form factor and reduced system cost. Such features are highly desirable in many applications, including, for example, electric motor control.

FIG. 1 is an isometric side view of a MOSFET device with an undulating channel. As shown in FIG. 1 , a substrate 102 may have a drift region 104 disposed thereon. For example, at least a portion of an epitaxial layer formed on the substrate 102 provides a drift region, which may be, e.g., low-doped n-type. The drift region 104 may have thickness and doping values selected to support desired MOSFET operational characteristics.

Heavily-doped p-regions 106 are formed in lightly-doped p-region 110. Source region 108 is disposed within the heavily-doped p-region 106 and the lightly-doped p-region 110, as is more easily seen, for example, in the cross-sectional views of FIGS. 3 and 4 . The source regions 108 may be, e.g, heavily doped n-type regions.

Accordingly, a MOSFET structure is formed which is commonly referred to as a vertical MOSFET structure, in which current flows from the source region 108, through the heavily-doped p-region 106, the lightly-doped p-region 110, and a junction field effect transistor (JFET) region 112 that is formed adjacent to the lightly-doped p-region 110. The MOSFET current proceeds through the drift region 104 to the substrate 102, at which a drain terminal (not shown in FIG. 1 ) is typically provided. Further, various types of gates or gate structures (and associated gate contacts) may be used to control the current flow, where examples of such gate structures and contacts are provided below, e.g., with respect to FIGS. 3, 4, and 5 , but are not shown in FIGS. 1 and 2 for the sake of better illustrating (e.g., to avoid obscuring) the various features thereof described herein.

As the lightly-doped p-region 110 has the heavily-doped p-region 106 formed therein, an edge or boundary 110 a exists therebetween, defining a distance or width between the boundary 110 a and an outer edge 110 b of the lightly-doped region 110. Such edges 110 a, 110 b are illustrated in simplified form in FIG. 3 for the sake of explanation, but it will be appreciated that, in practice and due to the nature of semiconductor processing, such edges are not discretely defined, as shown in FIG. 1 , and in the more detailed example of FIG. 4 .

Therefore, as shown and described below with respect to FIGS. 3 and 4 , a channel region may include a heavily-doped current channel portion defined by a portion of the heavily-doped p-region 106 between the source region 108 and the boundary 110 a of the lightly-doped region 110, as well as a lightly-doped current channel portion defined between the edges 110 a, 110 b. The heavily-doped p-regions 106 may provide body contacts where accessible within the source region(s) 108, and, as described with respect to FIGS. 6A-6D, may be provided in multiple processing steps.

In FIG. 1 , a vertical direction of current flow in the vertical MOSFET structure is thus understood to occur in a direction of a y-axis shown in the included legend. A lateral direction along an x-axis is also illustrated that is perpendicular to the y-axis, while a z-axis defines a direction along a longitudinal axis 114 running through the heavily-doped p-region(s) 106. Cross section 116 is taken as an x-y cross section that is orthogonal to the longitudinal axis 114, and illustrated in more detail in FIGS. 3 and 4 , while cross section 118 is taken as an x-y cross section that is orthogonal to the longitudinal axis 114, and illustrated in more detail in FIG. 3 .

In FIG. 1 , the channel edge 110 b extends varying distances along the x-axis and perpendicular to the longitudinal axis 114. Thus, the channel edge 110 may be described as providing an undulating or oscillating channel edge. As described herein, the undulating channel edge 110 b provides additional current paths, as compared to, for example, a straight or striped channel edge. The additional current paths enable a low specific on-resistance (R_(sp)), without sacrificing SOA.

In particular, the undulating channel edge 110 results in the JFET region 112 having a wide JFET region 112 a and a narrow JFET region 112 b. That is, as is more easily seen, for example, in FIG. 2 , the MOSFET device of FIG. 1 may be formed using at least two adjacent implementations of the structure of FIG. 1 , so that n-type regions formed therebetween effectively provide an n-type JFET region in the drift region 104, with surrounding p-type regions providing a gating function for such JFET regions. During periods of high current flow, particularly for suddenly high current flows occurring during a short-circuit event, the dual gating function of such JFET regions leads to a pinch-off effect that limits, restricts, or prevents corresponding short-circuit currents that might otherwise damage the MOSFET device of FIG. 1 . Moreover, the alternating wide JFET regions 112 a and narrow JFET regions 112 b provide such short-circuit current limiting effects without sacrificing a desired, low specific on-resistance (R_(sp)).

The alternating wide JFET regions 112 a and narrow JFET regions 112 b corresponding to, and defined by, the undulating nature of the channel edge 110 b provide additional advantages as well. Thus, a plurality of junction field effect transistor (JFET) regions 112 a, 112 b are disposed between the channel region and the drift region, with the plurality of JFET regions 112 a, 112 b having widths that alternate in correspondence with undulations of the undulating channel edge 110 b. As a result, for example, a device breakdown voltage may be increased due to a distribution of electric fields in the wide JFET regions 112 a into the narrow JFET regions 112 b.

In the present description, the relative terms wide/narrow should be understood to be with respect to one another, such that the wide JFET regions 112 a are wider than the narrow JFET regions 112 b. Examples of extents of differences (deltas) between the wide JFET regions 112 a and the narrow JFET regions 112 b are provided below, e.g., in the contact of the parameter L_(pull-back).

FIG. 2 illustrates a top view of two adjacent implementations of the structure of FIG. 1 , with reference numerals of FIG. 1 (in the 1xx series) therefore being repeated with respect to the corresponding (lower) top view thereof. Reference numerals in a 2xx series correspond to the same or similar aspects in the second implementation. Consequently, FIG. 2 illustrates heavily-doped p region 206, lightly-doped p-region 210, JFET region 212 (including wide JFET region 212 a and narrow JFET region 212 b), and a longitudinal axis 214 (source region 108 and corresponding source region 208 are not illustrated in FIG. 2 for the sake of simplicity).

FIG. 2 thus illustrates that the wide JFET region 112 a and narrow JFET region are defined between two adjacent lightly-doped p-regions 110, 210 of adjacent MOSFET devices. As also shown in FIG. 1 , an edge-to-edge distance 116 a may be defined between outer edges of the lightly-doped p-region 110 along an x direction of the cross-section 116 (adjacent to the narrow JFET region 112 b), while an edge-to-edge distance 118 a may be defined between outer edges of the lightly-doped p-region 110 along an x direction of the cross-section 118 (adjacent to the wide JFET region 112 a).

FIG. 3 illustrates two simplified cross-sectional views of the MOSFET device of FIG. 1 , corresponding to cross-sections 116, 118 of FIG. 1 . In FIG. 3 , drain terminal 302 is illustrated, as well as gate oxide 304 and gates 306. A contact line 308 is illustrated in cross-section as well. Further details of example implementations of the gate structures 304, 306 and contact line 308 are provided below, e.g., with respect to FIG. 5 .

FIG. 3 illustrates that a distance (edge-to-edge width) 116 a of the channel edge 110 b at cross-section 116 is greater than a distance (edge-to-edge width) 118 a of the channel edge 110 b at cross-section 118. A distance (center-to-edge width) 116 b from the longitudinal axis 114 is correspondingly greater than a distance (center-to-edge width) 118 b from the longitudinal axis 114.

In particular, a distance labeled L_(pull-back) represents a delta between the distance 116 b and the distance 118 b. Correspondingly L_(pull-back) may be referred to as a delta between a half-width of the wide JFET region 112 a and a half-width of the narrow JFET region 112 b, as shown in FIG. 3 and with reference to FIG. 2 .

FIG. 4 is a more detailed illustration of the cross-sectional view 116 of the MOSFET device of FIG. 1 . FIG. 4 illustrates that a lightly-doped channel region 402 exists between the boundary 110 a and the channel edge 110 b, while a heavily-doped channel region 404 exists between the boundary 110 a and the source region 108. As referenced above, FIG. 4 also illustrates a diffused nature of the lightly-doped channel region 402, the heavily-doped channel region 404, and the boundary 110 a therebetween.

FIG. 5 is a top view of a more detailed example implementation of the MOSFET device of FIG. 1 . FIG. 5 illustrates that the gate 306 is disposed along the longitudinal axis 114 with a gate contact 308 disposed therebetween, as already illustrated and described with respect to FIGS. 3 and 4 . Dielectric 502 is disposed between the gate 306 and the contact 308.

FIG. 5 further illustrates the wide JFET region 112 a and the narrow JFET region 112 b. As also already described, the delta between these values may be referenced as the illustrated L_(pull-back) parameter. Additional characteristic parameters include a longitudinal JFET length 504 of the wide JFET region 112 a, and a longitudinal JFET length 506 of the narrow JFET region 112 b.

FIGS. 6A-6D illustrate an example process flow for making the MOSFET device of FIG. 1 . In FIG. 6A, the illustrated process flow begins with performing p-well channel implantation (602), e.g., using ion implantation (IIP). As shown, a hard mask oxide 602 a may be used that has an opening corresponding to desired parameters for the resulting p-implantation well 602 b, including a desired L_(pull-back), as described and illustrated above.

In FIG. 6B, pocket implantation is performed using a spacer (e.g., a polysilicon spacer) 604 a (604). As a result, higher doping p-well region 604 b is formed, relative to lower-doped p-regions 602 b. The p-well region(s) 604 b may be referred to as pocket implantation regions, and contribute to the heavily-doped channel region 404 of FIG. 4 , as compared to the lightly-doped channel region 402 of FIG. 4 (provided by the p-regions 602 b).

In FIG. 6C, implantation is performed for source region 606 a (606), of opposite conductivity type than the regions 602 b, 604 b, e.g., n-type conductivity. Updated spacers 606 b may be used to obtain a desired size and shape of the source region 606 a.

In FIG. 6D, p-type island regions 608 a are formed, and the hard mask oxide 602 a and spacer(s) 604 a/606 b are removed to obtain a final structure of FIG. 1 (608). As referenced above, the p-type island regions 608 a may provide body contacts within the heavily-doped p-region(s) 106 of FIG. 1 .

FIG. 7 illustrates an isometric view of an implementation of the MOSFET device of FIG. 1 , including a first current density distribution. FIG. 8 illustrates an isometric view of the implementation of the MOSFET device of FIG. 17 , including a second current density distribution. In both FIGS. 7 and 8 , V_(GS) is held constant (e.g., at 18V), while in FIG. 7 V_(DS) is a low value (e.g., at or below 1V), while in FIG. 8 , V_(DS) is at a relatively higher voltage (e.g., 10-80V or higher, e.g., 65V).

FIG. 7 illustrates a depletion region 702, while FIG. 8 illustrates a depletion region 802. As shown, the depletion region 802 is considerably expanded in comparison to the depletion region 702 of FIG. 7 , due to the relatively higher value of V_(DS) in FIG. 8 . As a result, the depletion region 802 extends to regions 804, thereby preventing current flow in the regions 804. Accordingly, as referenced above, short-circuit current protection is provided, as current is unable to flow in the regions 804 due to the expansion of the depletion region 802. Put another way, the regions 804 correspond to narrow JFET regions in which current saturation is reached prior to short-circuit breakdown.

FIG. 9 is a graph illustrating a current-voltage characteristic of the example of FIG. 7 . FIG. 10 is a graph illustrating a current-voltage characteristic of the example of FIG. 8 .

In FIG. 9 , line 902 indicates a current-voltage characteristic for the implementation of FIG. 7 , in which drain current changes over a low, small voltage range of V_(DS), such as, e.g., less than 1V. The line 904 provides a similar type of current-voltage characteristic for a comparison device having a straight or uniform channel, as compared to the undulating channel of FIGS. 1, 7, and 8 .

As shown, the resulting R_(DS-ON) characteristics defined by the current/voltage relationship provides a value of R_(DS-ON) 906 for the implementation of FIG. 7 that is lower than that of the comparison device.

Meanwhile, in FIG. 10 , a line 1002 corresponds to the implementation of FIG. 8 , while line 1004 corresponds to the comparison device referenced above. As shown, as a result of the depletion region 802 extending into the regions 804, the current of the line 1002 saturates faster and at a much lower value of V_(DS) then the reference device.

FIG. 11 is a graph illustrating example changes in threshold voltage with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 . FIG. 11 illustrates that increases in L_(pull-back) correspond to increases in threshold voltage.

FIG. 12 is a graph illustrating example changes in specific on-resistance with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 . FIG. 12 illustrates that increases in L_(pull-back) correspond to increases in R_(DS-ON).

FIG. 13 is a graph illustrating example changes in short circuit current I_(sc) with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 . FIG. 13 indicates that increases in L_(pull-back) correspond to decreases in short circuit current I_(SC).

FIG. 14 is a graph illustrating example changes in breakdown voltage (BV) with extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 . FIG. 14 illustrates that increases in L_(pull-back) correspond to stable breakdown voltages, because high electric fields in the wide JFET regions that might otherwise lead to breakdown events can be distributed to adjacent narrow JFET regions.

FIG. 15 illustrates example doping profiles at multiple processing stages and variations thereof with respect to extent of delta L_(pull-back) in the undulating channel of example implementations of FIG. 1 . In particular, FIG. 15 illustrates examples of the processing stages 602, 604 of FIGS. 6A and 6B, for three different, increasing values of L_(pull-back).

At a first value of L_(pull-back) 1500 a, regions 1502 and 1504 exhibit a degree of dopant concentration. For example, the implanted p-type dopants (e.g., Aluminum (Al) dopants), exhibit the illustrated degree of concentration in regions adjacent to narrow JFET regions. For example, dopant concentration in the region 1502 may occur as a result of scattering and reflection of the implanted dopants from the hard mask oxide 602 a.

At a second value of L_(pull-back) 1500 b, increased from 1500 a, these effects of increased doping concentrations in regions 1506 and 1508 are increased. At a third value of L_(pull-back) 1500 c, increased from 1500 b, these effects of increased doping concentrations in regions 1510 and 1512 are increased further.

Thus, in general, increased values or extends of L_(pull-back) result in increase of doping concentrations in the indicated regions. These increased doping concentrations increase the heavily doped channel regions discussed above, such as heavily-doped channel region 404 of FIG. 4 , and are consistent with the characteristic relationships between L_(pull-back) and V_(th), R_(DSon), I_(sc), and BV shown in FIGS. 11-14 , respectively, as described above.

FIG. 16 is a graph illustrating resulting doping concentrations in example implementations of the structure of FIG. 1 , using the example values 1500 a, 1500 b, 1500 c from FIG. 15 for delta L_(pull-back) in the undulating channel. FIG. 16 is taken across the cut plane illustrated in FIG. 15 , and demonstrates the relative increase in doping concentration within the heavily-doped channel region for the highest value 1500 c of L_(pull-back).

FIG. 17 is a graph illustrating specific on-resistance as a function of threshold voltage for an example implementation of FIG. 1 . In FIG. 17 , a line 1702 illustrates values of R_(Spon) for implementations of FIG. 1 , while a line 1704 illustrates values of R_(Spon) for a comparison device with a straight, not undulating channel. As shown, the line 1702 indicates that R_(Spon) values are lower across a range of threshold voltages for the implementation of FIG. 1 .

FIG. 18 is a graph illustrating threshold voltage as a function of temperature for an example implementation of FIG. 1 . As shown, line 1802 corresponding to implementations of FIG. 1 are consistent with line 1804 for the comparison device of FIG. 17 . Accordingly, FIG. 18 illustrates that implementations of FIG. 1 do not suffer from decreased temperature performance.

It will be understood that, in the foregoing description, when an element, such as a layer, a region, a substrate, or component is referred to as being on, connected to, electrically connected to, coupled to, or electrically coupled to another element, it may be directly on, connected or coupled to the other element, or one or more intervening elements may be present. In contrast, when an element is referred to as being directly on, directly connected to or directly coupled to another element or layer, there are no intervening elements or layers present. Although the terms directly on, directly connected to, or directly coupled to may not be used throughout the detailed description, elements that are shown as being directly on, directly connected or directly coupled can be referred to as such. The claims of the application, if any, may be amended to recite exemplary relationships described in the specification or shown in the figures.

As used in the specification and claims, a singular form may, unless definitely indicating a particular case in terms of the context, include a plural form. Spatially relative terms (e.g., over, above, upper, under, beneath, below, lower, and so forth) are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. In some implementations, the relative terms above and below can, respectively, include vertically above and vertically below. In some implementations, the term adjacent can include laterally adjacent to or horizontally adjacent to.

Some implementations may be implemented using various semiconductor processing and/or packaging techniques. Some implementations may be implemented using various types of semiconductor processing techniques associated with semiconductor substrates including, but not limited to, for example, Silicon (Si), Gallium Arsenide (GaAs), Gallium Nitride (GaN), Silicon Carbide (SiC) and/or so forth.

While certain features of the described implementations have been illustrated as described herein, many modifications, substitutions, changes and equivalents will now occur to those skilled in the art. It is, therefore, to be understood that the appended claims are intended to cover all such modifications and changes as fall within the scope of the implementations. It should be understood that they have been presented by way of example only, not limitation, and various changes in form and details may be made. Any portion of the apparatus and/or methods described herein may be combined in any combination, except mutually exclusive combinations. The implementations described herein can include various combinations and/or sub-combinations of the functions, components and/or features of the different implementations described.

While certain features of the described implementations have been illustrated as described herein, many modifications, substitutions, changes and equivalents will now occur to those skilled in the art. It is, therefore, to be understood that the appended claims are intended to cover all such modifications and changes as fall within the scope of the embodiments. 

What is claimed is:
 1. A method of making a SiC semiconductor device, the method comprising: forming a drift region on a substrate; implanting a channel region in the drift region and along a longitudinal axis, the channel region having alternating well widths with respect to the longitudinal axis; implanting a source region in the channel region; and forming at least one gate on at least a portion of the source region, at least a portion of the channel region, and on a plurality of junction field effect transistor (JFET) regions disposed between the channel region and the drift region, the plurality of JFET regions having alternating JFET widths that alternate in correspondence with the alternating well widths.
 2. The method of claim 1, wherein implanting the channel region comprises: providing a mask on the drift region, the mask having an opening corresponding to the alternating well widths of the channel region; and implanting dopants into the drift region at a first doping concentration, using the mask.
 3. The method of claim 2, further comprising: providing a spacer along the opening of the mask to expose a portion of the channel region; and implanting additional dopants into the portion of the channel region to provide a second doping concentration.
 4. The method of claim 2, comprising: providing the mask opening with alternating widths in which adjacent widths differ by at least 0.5 microns.
 5. The method of claim 2, wherein the alternating well widths include a first channel width and a second channel width greater than the first channel width, and further comprising: implanting body contact regions within the channel region and within the second channel width.
 6. The method of claim 1, wherein the SiC semiconductor device includes at least one Metal Oxide Semiconductor Field Effect Transistor (MOSFET), and further comprising: forming the substrate on a drain terminal of the MOSFET.
 7. The method of claim 1, further comprising: implanting body contact regions within the source region and along the longitudinal axis.
 8. A method of making a SiC semiconductor device, the method comprising: forming a drift region of a first conductivity type and a first doping concentration on a substrate of the first conductivity type; forming a channel region of a second conductivity type within the drift region and disposed along a longitudinal axis, the channel region having a first cross-sectional area orthogonal to the longitudinal axis, in which the channel region has a first width, and a second cross-sectional area orthogonal to the longitudinal axis, in which the channel region has a second width that is smaller than the first width; forming a source region of the first conductivity type disposed within the channel region; forming a plurality of junction field effect transistor (JFET) regions between the channel region and the drift region, the plurality of JFET regions being of the first conductivity type and having a second doping concentration that is greater than the first doping concentration of the drift region; and forming gates disposed along the longitudinal axis and on at least a portion of the source region, the channel region, and the plurality of JFET regions.
 9. The method of claim 8, comprising: forming a heavily-doped channel region in the channel region, between the source region and a lightly-doped channel region of the channel region; and forming the lightly-doped channel region between the heavily-doped channel region and a JFET region of the plurality of JFET regions.
 10. The method of claim 8, wherein forming the plurality of JFET regions comprises: forming a first JFET region within the first cross-sectional area having a first JFET width; and forming a second JFET region within the second cross-sectional area having a second JFET width that is wider than the first JFET width.
 11. The method of claim 8, wherein the channel region includes an undulating channel edge along a direction of the longitudinal axis.
 12. The method of claim 8, comprising: forming a plurality of body contact regions of the second conductivity type within the source region and along the longitudinal axis.
 13. The method of claim 8, wherein a delta between the first width and the second width is at least 0.5 microns.
 14. The method of claim 8, wherein the SiC semiconductor device includes at least one Metal Oxide Semiconductor Field Effect Transistor (MOSFET), and further comprising; forming a drain terminal of the MOSFET; and forming the substrate on the drain terminal of the MOSFET.
 15. The method of claim 8, wherein forming the channel region comprises: providing a mask on the drift region, the mask having an opening corresponding to the first width and the second width of the channel region; and implanting dopants into the drift region, using the mask.
 16. A method of making a SiC semiconductor device, the method comprising: forming a drift region of a first conductivity type on a substrate of the first conductivity type; forming a channel region of a second conductivity type within the drift region, the channel region having an undulating channel edge; forming a source region disposed in the channel region; forming a plurality of junction field effect transistor (JFET) regions disposed between the channel region and the drift region, the plurality of JFET regions having widths that alternate in correspondence with undulations of the undulating channel edge; forming a heavily-doped channel region between the source region and a lightly-doped channel region of the channel region; forming the lightly-doped channel region between the heavily-doped channel region and a JFET region of the plurality of JFET regions; and forming at least one gate disposed on at least a portion of the source region, the channel region, and the plurality of JFET regions.
 17. The method of claim 16, wherein forming the channel region comprises: providing a mask on the drift region, the mask having an opening corresponding to the undulating channel edge; and implanting dopants into the drift region, using the mask.
 18. The method of claim 17, further comprising: providing a spacer along the opening of the mask to expose a portion of the channel region; and implanting additional dopants into the portion of the channel region to provide the heavily-doped channel region.
 19. The method of claim 17, comprising: providing the mask opening with alternating widths corresponding to the undulating edges, in which adjacent widths differ by at least 0.5 microns.
 20. The method of claim 16, wherein the SiC semiconductor device includes at least one Metal Oxide Semiconductor Field Effect Transistor (MOSFET), and further comprising; forming a drain terminal of the MOSFET; and forming the substrate on the drain terminal of the MOSFET. 